Western Digital

A Class 100 cleanroom expansion for Western Digital in San Jose, built to host a new ASM/TEL semiconductor processing tool. The expansion ties into the client's existing adjacent cleanroom and adds the infrastructure needed to support photolithography operations.

The new cleanroom uses a Cleanpak gel-sealed grid system with an 18-inch raised access floor. Aluminum honeycomb wall systems separate the new space from the existing cleanroom, with catwalks and walking platforms built into the interstitial space. The scope includes partition walls, fire alarm upgrades, new mechanical exhaust systems, and distribution of acid waste, DI water, process cooling water, clean dry air, nitrogen, and process vacuum to support liquid chemistry and laser generation for photolithography. Electrical systems were sized to support the cleanroom and future tools. The project ran on a fast-tracked schedule with weekend and double-shift work.

A Class 100 cleanroom expansion ready for ASM/TEL tool installation and integration with Western Digital's existing photolithography operations. The depressed floor design, full process gas distribution, and integrated control systems give the new space the same operational capability as the original cleanroom it ties into.