KLA

A new Class 100 cleanroom and laboratory buildout for KLA in San Jose. The cleanroom and adjacent lab were built inside an active KLA facility, requiring careful coordination to keep the rest of the operation running.

The cleanroom portion was built to Class 100 standards with 100 percent filter coverage, including custom Gordon ceiling, cleanroom panels, low wall returns, and a honeycomb wall return plenum chase. Custom redundant air handling units with chilled water and hot water supply and return were installed and tied into the existing building mains. An outdoor dehumidification system was added for humidity control, along with fan-powered HEPA filters. The adjacent lab space received a VAV hot water supply and return system with DDC controls for testing operations.

A fully functional Class 100 cleanroom and lab built inside KLA's active facility without taking the surrounding operations offline. The redundant air handling and dedicated dehumidification system give the cleanroom the tight humidity and air quality control KLA's testing work requires.